| 发明名称 |
Apparatus for dendritic web growth systems |
| 摘要 |
A method and apparatus for growing dendritic web crystals at increased growth rates is disclosed in which a sublid is used to maintain a sufficiently hot silicon melt surface temperature to insure stable web growth, while simultaneously permitting more efficient heat transfer from the growing dendritic web to the cooler susceptor lid.
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| 申请公布号 |
US4786479(A) |
申请公布日期 |
1988.11.22 |
| 申请号 |
US19870092791 |
申请日期 |
1987.09.02 |
| 申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY |
发明人 |
HUNDAL, ROLV;SEIDENSTICKER, RAYMOND G.;MCHUGH, JAMES P. |
| 分类号 |
C30B15/00;C30B15/14;C30B15/34;C30B29/06;C30B29/64;H01L21/208;(IPC1-7):C30B35/00;C30B29/60 |
主分类号 |
C30B15/00 |
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