| 摘要 |
PURPOSE:To keep a room completely unmanned and perfectly clean by a method wherein the control is separated and the system main body is operated from a different room. CONSTITUTION:An operating terminal 20 connected to fully automated probers Pr 10 is installed in an operating room 2 separated from a clean room 1 where the probers Pr 10 are located. The operating terminal 20 selects a Pr 10-1 out of the probers Pr 10, and parameters are fed into the prober Pr 10-1 through the keyboard for activation. The prober Pr 10-1 performs wafer loading and then alignment and, upon completion thereof, transmits a signal. The operator watching the monitor panel recognizes the end of alignment and performs such jobs as the checking of probing points 5 on a monitor television connected to a microscope. Next, probing is started, and the prober Pr 10-1 is disengaged by control remote from the operating terminal 20. A clean room using this method may enjoy an almost perfect freedom from operators or dust.
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