| 摘要 |
PURPOSE:To improve the reliability and durability of a head by enabling an aperture of an insulating material part to be highly precisely worked by an optional size, by forming electrode parts opposed to each other pinching the insulating material between them by etching working. CONSTITUTION:Apertures 10 are preliminarily formed at positions of an insulating material 5 corresponding to an aperture 8 of a discharge electrode 2 and an aperture 9 of a control electrode 4 by dimensions larger than those apertures 8, 9 by etching working, punching working, etc. Then, conductive foils 2', 4' which become electrode raw materials are laminated to be sticked onto both sides of the insulating material 5. After lamination, they are surely sticked thereto by an uniform thickness by using a hot press, a hot roller, etc. After sticking by lamination, an etching resist pattern corresponding to an electrode form and an aperture form is formed on the surface of each conductive foil 2', 4' and the conductive foils are etched (c). Besides, the conductive foils are laminated to be sticked onto a substrate 6 and an induction electrode 1 is formed in the same way as above-mentioned (d). Then, adhesives layers 11 are formed on both surface of an dielectric 4, are pinched between the lamination materials of above-mentioned (c), (d), and the whole body are solidly laminated to be sticked. |
