| 摘要 |
<p>PURPOSE:To enable easy setting of each storage chamber to different gaseous atmosphere by chambers, by providing each storage chamber with independent and separate means for controlling the feeding rate of atmospheric gas or a means for controlling the vacuum degree of the chamber. CONSTITUTION:A storage house 41 is divided into plural storage chambers 43a, 43b,...43n. Each storage chamber 43a, 43b,...43n is provided with a vacuum regulator (means for controlling vacuum degree) 45a, 45b,...45n and connected to a common vacuum pump 47 (evacuation system). Separately, a common source 11 for supplying atmospheric gas is connected to each storage chamber 43a, 43b,...43n through a means 21a, 21b,...21n for controlling the feeding rate of atmospheric gas. Each controlling means 21a, 21b,...21n is independently controlled for each storage chamber 43a, 43b,...43n and the vacuum degree of each storage chamber 43a, 43b,...43n is controlled by the means 45a, 45b,...45n for controlling vacuum degree.</p> |
