| 摘要 |
PURPOSE:To measure exact temperature of a crucible for molecular beam ray by insulating around a temperature measuring means such as a thermocouple or the like to sense the temperature of said crucible close in contact with the crucible with heat shielding materials. CONSTITUTION:A crucible 1 to be filled with the raw materials of molecular beam is supported with tantalum heat shielding plates 5 and 6, and its side sections are supported with press components 4a and 4b used combinedly for the support of heaters 3. The heaters 3, supported by the press components 4a and 4b, are disposed around the side face of the crucible 1, while a thermocouple 2 runs through a pedestal 9 and a heat shielding plate 8 at the bottom section of the crucible 1 and also runs through the area insulated with heat shielding plates 5-7 and is connected with. Although when the crucible 1 is heated with the heaters, the temperature of the crucible 1 rises, while radiation heat from the heater 3 is not received directly by the thermocouple 2 because of the heat shielding plates 5-7, and the temperature of the crucible 1 can be measured accurately. |
