| 摘要 |
PURPOSE:To form an accurate substrate by setting substantially equal contractions at the times of drying and sintering it by controlling the drying contraction rate at the time of drying on the basis of the relationship between the drying contraction rate and the sintering contraction rate of a ceramic green sheet. CONSTITUTION:Restriction chucks 2a, 2b are set by stopper pins 3a, 3b on the basis of the relationship between the drying contraction rate and the sintering contraction rate of a ceramic green sheet obtained in advance, and the drying contraction rates in an extruding direction at the time of forming the green sheet 1 at the time of drying the sheet 1 and in a direction perpendicular thereto are set to predetermined values. Thus, the drying contraction rates in the perpendicular two directions substantially coincide with the sintering contraction rates in the perpendicular two directions in case of laminating and sintering the sheets 1, thereby forming a ceramic multilayer interconnection substrate which does not generate a gap and has a high dimensional accuracy in a easy step management. |
