PRODUCTION APPARATUS FOR COMPOUND CRYSTAL

摘要

PURPOSE:To easily and correctly detect the completion of synthetic reaction for a compound and to obtain the crystal of compound semiconductor of good quality by hanging a crucible and providing a weight sensor at the top end of a hanging mechanism in the production of the crystal of compound produced by reacting >=2 kinds of elements in the crucible by Czochralski method. CONSTITUTION:In the production of compound crystal with Czochralski method by reacting >=2 kinds of elements in the crucible, the apparatus is so constituted that the crucible 6 having a sealing means (liquid sealing agent 8) covering the surface of the molten liquid 7 is hung from the upper part and a supporting means 1 is provided which is furnished with the weight sensor 2. The supporting means 1 is preferably rotated, swung or vibrated to agitate the molten liquid 7 in the crucible 6.