| 摘要 |
PURPOSE:To improve wettability and to finely work by etching in accordance with an increase in an integration by containing at least one of specific four types of surfactants in buffered fluoric acid solution as a fine working surface treating agent. CONSTITUTION:At least one selected from a group consisting of surfactants made of fatty carboxylic acid, fatty carboxylic acid salt, fatty amine and fatty alcohol in a mixture of hydrogen fluoric acid, ammonium fluoride solution and wafer, i.e., buffered fluoric acid solution to form a fine working surface treating agent. The fatty carboxylic acid is of a compound represented by a general formula CnH2n+1COOH, the fatty carboxylic acid salt is represented by a general formula CnH2n+1COONH2R, the fatty amine is represented by a general formula CmH2n+1NH2, while the fatty alcohol is represented by a general formula CnH2n+1OH.
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