发明名称 SEMICONDUCTOR RADIATION DETECTOR
摘要 PURPOSE:To detect an ionization current with high efficiency, by changing the intensity of the n-type region formed to a low specific resistance p-type CdTe single crystal in accordance with the intensity of the energy of a radiation source. CONSTITUTION:An n-layer 2 is formed, for example, by applying Al to one surface of a low specific resistance p-type CdTe single crystal wafer 1 by vacuum vapor deposition and subsequently heating said wafer 1 for a predetermined time to thermally diffuse Al while an ohmic electrode 3 is formed by applying an aqueous gold chloride solution to the other surface of the wafer 1. For example, gamma-rays incident to the n-layer 2 in this constitution lose energy in the wafer 1 to form an electron-hole pair. This electron-hole pair becomes an output current since an electron is taken out on the side of an Al electrode and a hole is taken out on the side of the Au electrode 3 by the diffusion potential in the depleted layer formed by the pn junction being the boundary of a p-layer and the n-layer. This current is amplified by an I/V converting amplifier 5 through a lead wire 6 to be converted to voltage. The depth of the n-layer is increased with respect to high energy radiation and reduced with respect to low energy radiation. By this method, an ionization current can be taken out with high efficiency.
申请公布号 JPS63282682(A) 申请公布日期 1988.11.18
申请号 JP19870117690 申请日期 1987.05.14
申请人 YOKOGAWA ELECTRIC CORP 发明人 FUJITA YURIKO;WADA MORIO;SUZUKI JUNICHI
分类号 G01T1/24;H01L31/00;H01L31/09 主分类号 G01T1/24
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