| 摘要 |
PURPOSE:To improve the control accuracy of a process by previously setting up plural correction values for correcting a set process value in accordance with a deviation value, adding a correction value corresponding to the detected deviation value to the set process value and calculating a manipulated variable based on the corrected set process value. CONSTITUTION:Correction values for correcting a set process value corresponding to a deviation value between the set process value and a measured process value are previously set up, the correction value corresponding to the detected deviation value is added to the set process value to correct the set process value to correct the set process value and control for calculating the manipulated variable of a process driving systems is repeated based on the corrected set process value to shorten the reducing time of the deviation value. At the time of changing a correction value to be added, the calculation factor of the manipulated variable is changed to change the manipulated variable more than the changing ratio of the correction value and the reduce overshoot. Consequently, the deviation value can be highly accurately detected and control response performance and control accuracy can be improved.
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