发明名称 WINDING SYSTEM VAPOR DEPOSITION APPARATUS PROVIDED WITH ROLL POSITION REGULATING MECHANISM
摘要 PURPOSE:To prevent ununiform winding after repeated vapor deposition and to align the roll edges of a film around a winding shaft and a sending shaft by providing the titled winding system vapor deposition apparatus with controllers which give signals for driving the shafts in such directions at such speeds as to eliminate a shift of the film. CONSTITUTION:A winding shaft 11 is driven to continuously travel a film 15 on the surface of a main roller 13 and the film 15 is wound around the shaft 11 after coating with an evaporating source. In order to detect a shift of the film 15, sensors 20 are separately arranged near the shaft 11 and a sending shaft 12 so that the output of the detecting part 21a of the one of the sensors 20 is kept always off and the output of the detecting part 21a of the other is kept always on when the edges of the film are at normal positions. Output signals from the sensors 20 are sent to theoretical control and driving control parts 22, 25. The control parts 22 control the moving directions of the shafts 11, 12 according to the signals. The control parts 25 send a signal for the speed of the film 15 according to the output of a tachometer generator TG attached to a motor M for driving the roller 13.
申请公布号 JPS63282267(A) 申请公布日期 1988.11.18
申请号 JP19870115800 申请日期 1987.05.14
申请人 ULVAC CORP 发明人 KASUYA YUTAKA;SHIMIZU AKIRA;YAMAMOTO AKIRA;OKUTSU SEIICHI
分类号 C23C14/56;C23C14/54 主分类号 C23C14/56
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