| 摘要 |
PURPOSE:To obtain a single crystal having a specified composition with good reproducibility by adjusting the composition of the raw material melt in a crucible with the use of a gravimeter fixed to an upper shaft at the time of producing a single crystal by the liq.-sealing Czochralski method. CONSTITUTION:The following constitution is used at the time of producing a single crystal by the liq.-sealing Czochralski method. Namely, the vapor of a volatile element is supplied (feeder 10) into the raw material melt 8 in the crucible 1 hung from the upper shaft 4, the change in the weight of the raw material melt 8 is measured by the gravimeter 5 fixed to the upper shaft 4 to adjust the composition of the raw material melt 8, the crucible 1 is then detached from the upper shaft 4, the supply of the vapor is stopped, a seed crystal 11 at the tip of the upper shaft 4 is then dipped into the raw material melt 8, and a single crystal 14 is pulled up.
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