| 摘要 |
PURPOSE:To efficiently extract a large quantity of high-speed atoms for a long time and adjust the energy of a high-speed atomic beam by providing the first cathode constituted of multiple hollow cathodes, the second cathode with a truncated cone-shaped inner face, a ring-shaped anode, a DC high-voltage power supply, and a DC bias power supply. CONSTITUTION:The first cathode 2 constituted of multiple cylindrical hollow cathodes 21a, the second cathode 22 with a truncated cone shape, and a ring- shaped anode 23 are provided, and the cathodes 21, 22 are arranged face to face across the anode 23. The second cathode 22 is biased with a DC power supply 24 to the potential slightly lower than that of the first cathode 21. After a container is exhausted, argon gas is introduced, the DC high voltage is applied, then plasma is generated, and argon ions and electrons are generated. The potential of the second cathode 22 can be set to the optimum value to reliably repel the electrons flying to the second cathode 22 from the anode 23 back to the anode 23 when the DC bias power supply 24 is adjusted.
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