| 摘要 |
PCT No. PCT/SE83/00393 Sec. 371 Date Jun. 29, 1984 Sec. 102(e) Date Jun. 29, 1984 PCT Filed Nov. 11, 1983 PCT Pub. No. WO84/01968 PCT Pub. Date May 24, 1984.Apparatus for carrying out liquid phase epitaxy growth comprising a melt holder having a predetermined number of cells for liquid phase melts for growing a number of epitaxial layers on a horizontally disposed substrate. The substrate is supported by a holder which is displaceable in order to bring the substrate into successive contact with the melts. A melt filler is disposed above the melt holder and contains a number of compartments corresponding to the number of cells in the melt holder and of greater volume than that of the cells for storing batches corresponding to several melts, the melts being supplied from the compartments to the cells through a displaceable perforated plate. A melt collector is arranged beneath the melt holder for collecting the melts from the cells. The melt holder has a displaceable bottom which undergoes displacement by the substrate holder and after the growth of each layer from the respective melt, the substrate holder is retracted to allow the melt in the associated cells to be deposited into the respective compartments of the melt collector. The melt collector and melt filler are substantially identical so that after the melt filler has been emptied, it can change places with the melt collector to immediately repeat the epitaxy growth process. |
