Integrated-circuit micro probe for detecting certain gases.

摘要

This integrated microsensor comprises a detection element (5) formed from a material (for example, SnO2) which is brought to a specific temperature and the resistivity of which varies in the presence of the gas to be detected. A heating element (8) is defined below the detection element (5) and forms with the latter an assembly which is connected to a silicon supporting frame (1) only by means of arms (3, 4). These arms are delimited by recesses (13) which can pass through the sensor from one side to the other and thereby thermally insulate the detection assembly (2) from the surrounding frame. <IMAGE>