| 摘要 |
PURPOSE:To improve a film forming speed without decreasing magnetic characteristics by crossing an electron beam and ion beam at least once. CONSTITUTION:The electron beam 24 which heats, melts and evaporates a magnetic material 23 is scanned transversely (the electron beam 24 forms a plane at this time) and the ion beam 26 is simultaneously directed onto a magnetic substrate 27 so as to cross the electron beam (the ion beam 26 forms a three-dimensional space figure, for example, a columnar shape, etc.). The thin iron nitride film type magnetic recording medium is produced at a higher speed by disposing the electron beam 24 and the ion beam 26 so as to cross each other in such a manner.
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