| 摘要 |
PURPOSE:To enable uniform heating treatment in a uniform temperature distribution along the depth direction of a sample by providing a high-frequency power source for generating a high-frequency voltage to be made the acceleration voltage of an electron beam, being overlapped with the voltage of a DC power source for making the amplitude and the frequency of the high-frequency voltage to be varied freely. CONSTITUTION:DC voltage 7 for accelerating an electron beam is overlapped with a high-frequency voltage 10 making frequency and amplitude variable to modulate the amplitude and the frequency of acceleration voltage at high speed. Any energy loss along the depth direction, inside a sample 6, of irradiation electrons 5 largely changes depending on the intensity of an acceleration voltage. Accordingly, when the acceleration voltage is changed at high speed, energy loss distributions corresponding to its respective acceleration voltages are piled in an instant so as to come to generate substantially new distribution in the inside of the sample 6. And, when the amplitude of this acceleration voltage is properly modulated, its new distribution can be made even and the sample 6 can be heated in a uniform temperature distribution.
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