BASE PLATE HEATING DEVICE

摘要

PURPOSE:To save a space and to improve thermal efficiency by providing plural substrate holding devices on preheating part, arranging plural heating blocks and base plate holding devices at heating part as well and arranging a duct between the preheating part and preheating source. CONSTITUTION:The preheating part base plate holding device 14 holding simultaneously a base plate 11 in plural pieces inside a preheating part is provided and the heating block 22 having a heating device 15 and base plate holding device 16 is arranged in plural pieces inside the heating part. The carry-in device 12 of the base plate 11 guides the base plate 11 to a preheating part via a chuck 12a and the hot blast of a preheating source 19 comes into the preheating part with a duct 20. The preheated base plate 11 is soldered by being heated at the heating part and a base plate taking-out device 17 carries out the base plate 11. The space as a furnace is thus reduced to efficiently heat the base plate 11 in plural pieces and of different kinds. Consequently the equipment is subjected to space saving and the heating efficiency in heating is improved.