| 摘要 |
PURPOSE:To detect the position of a drawing surface with respect to an emitting head over the entire length of a pattern route at the position in the vicinity of the emitting orifice of the emitting head without damaging the drawing surface, by mounting a displacement sensor on the side part of the emitting head and forming a light reflecting surface at the position in the vicinity of the emitting orifice and forming the light path reaching the drawing surface from the displacement sensor through the light reflecting surface. CONSTITUTION:The detection end part 5a of a displacement sensor 5 is mounted and fixed to the side part of the lower end part of an emitting head 2 through a mount bracket 4 and connected to a detector main body by an optical fiber 6. A reflecting surface 7 whose angle of inclination is 45 deg. with respect to the axis of the emitting head 2 is formed at the position in the vicinity of the emitting orifice 3 of the emitting head 2. Further, a prism 8 having a oblique surface opposed not only to the reflecting surface 7 in the diameter direction but also to the detection end part 5a in the axial direction is provided and supported by the mount bracket 4 through a holding member 9. The light path 11 reaching the drawing surface on a substrate 10 from the detection end part 5a is formed by the reflecting surface 7 and the prism 8.
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