| 摘要 |
PURPOSE:To judge whether the through-hole of an object to be measured is proper, by comparing the image of the through-hole detected by each of the light receiving part arranged toward the surface of the through-hole and the auxiliary light receiving part arranged so as to provided an angle with respect to the through-hole with the image of a reference through-hole. CONSTITUTION:A light receiving means 19 is arranged on the same side as a measuring light source with respect to an object 11 to be measured. An auxiliary light receiving means 20 is arranged so that the straight line connecting the light receiving means 19 and a through-hole 13 and the straight line connecting the auxiliary light receiving means 20 and the through-hole take an angle theta. Light data is electrically converted by the light receiving means 19 to be subjected to image processing by an processing means 23a and the signal from the image processing part and the signal sent from a reference signal generating means are sent to a discrimination means 21 to judge whether the through-hole is proper. The light received by the auxiliary light receiving means 20 is also processed in the same way and the discrimination means 21 judges whether the through-hole is proper.
|
