| 摘要 |
PURPOSE:To reduce the change in a volume of a treating tank due to vertical movement of the treating tank, by a method wherein a round column to support a table is formed in a hollow manner, and during lowering of the treating tank, treating liquid is caused to flow through the round column. CONSTITUTION:A round hollow column 17 to support a treating table 15 to which a workpiece W is attached is secured to a machine frame 3, and a treating tank 19 situated in a manner to surround the treating tank, is vertically movably supported by a vertical moving device 21. In the hollow part of a hollow round column 17, a piston 29 is coupled to the treating tank 19 through a piston rod 31, an arm 33, and a coupling rod 35, and is vertically moved together with the treating tank 19. A treating liquid passage 37 is formed in the upper part of the hollow round column 17, and with the treating tank 19 lowered, treating liquid in the treating tank 19 is caused to flow in the hollow part of the hollow round column 17 through the passage 37 for storage therein.
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