发明名称 ULTRAVIOLET RAYS ERASER
摘要 <p>PURPOSE:To shorten time required for erasing and to reduce electric loss required for the erasing by erasing a sample while confirming the erasing of it. CONSTITUTION:A controller 3 controls following operation until a timer 2 reaches the finishing time of irradiation and interrupts an ultraviolet rays by driving an ultraviolet rays interrupter 1 when the timer 2 arrives the finishing time of irradiation. That means, the controller 3 makes a UVPROM erasing monitor 4 to confirm the erasing of the sample every unit time. As the result, when the erasing is finished, the controller 3 interrupts the ultraviolet rays by driving the ultraviolet rays interrupter 1 after executing supplementary erasing. The controller 3 is composed of a CPU (central processing unit). Then it previously stored the time interval of the erasing confirmation and the addi tional erasing time and can drive the ultraviolet rays interrupter 1 according to the procedure of that. Thus, the erasing time is shortened and the electric loss of the over-erasing time accompanied with that is reduced.</p>
申请公布号 JPS63279499(A) 申请公布日期 1988.11.16
申请号 JP19870115211 申请日期 1987.05.11
申请人 NEC CORP 发明人 URABE MAKOTO
分类号 G11C17/00;G11C16/02;H01L21/66;H01L21/8247;H01L29/78;H01L29/788;H01L29/792 主分类号 G11C17/00
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