| 摘要 |
PURPOSE:To control the grinding amount on the basis of a conductive pattern and to enhance a production efficiency by a measurement simultaneous with grinding, by a method wherein, on a substrate, a checking conductive film is formed between a heating part and and end part of the substrate in the vicinity of the heating part, and a substrate end face in the vicinity of the heating part is ground with the measurement of a value of electrical resistance between the checking conductive film and a grinding tool. CONSTITUTION:Resistor layers 3, 4 are formed on a substrate 1 and a glaze layer 2, and thereon metallic layers 5, 6, and 7 are formed. The resistor layer 4 and the metallic layer 7 thereon are patterned between a substrate end part in the vicinity of a heating part and used as a checking electrode. Then, in the grinding of a substrate end face, he checking electrode 7 is noncommunicative to a grinding wheel in a range of L1-L2. When the grinding wheel reaches the point L2 to come into contact with the checking electrode 7, a value of resistance is remarkably reduced. When the wheel grinds the substrate end surface further to a point L3, a contact area between the grinding wheel and the checking electrode is reduced, and with this reduction a value of resistance is remarkably raised. In this manner, the detection of the decrease/increase of a value of resistance enables either the point L2 or L3 to be finished as an end face. |
