| 摘要 |
PURPOSE:To improve the accuracy in correcting the position of a mounting base by detecting the laser light emitted from the laser oscillator for alignment emitting a laser light on the same optical axis as that of the laser light for working and performing the positional correction of the mounting base. CONSTITUTION:The laser light for alignment is detected by a laser light receiving part 6 after scanning it in one side axial direction. Based on the light receiving result, a laser light is oscillated after automatically performing the positional correction in the theta direction of an optical system and a mounting base 5 to execute the working by the laser light. With the device of this composition, an aligning work can be shortened and aligning accuracy can be improved as well. |
