| 摘要 |
PURPOSE:To facilitate a gas-permeable membrane comprising a polymer membrane having a number of small apertures, by exposing a membrane of a photocurable polymer compound to light through an exposure mask in which a number of small regions for leaving unexposed areas are formed at predetermined intervals and developing the membrane. CONSTITUTION:A polymer compound which can cure by exposure to light, such as a negative resist used in lithography, is applied to, e.g., the region coinciding with the sensitive part of a gas sensor to form a membrane of the polymer compound. An exposure mask 3 in which a number of regions 31 for leaving unexposed areas, having a diameter of about 0.5mum, are formed at intervals of about 2mum is mounted on the membrane 2 of the polymer compound, and the membrane is exposed to light and developed. In this way, a gas- permeable membrane 5 comprising a polymer compound membrane in which a number of apertures 4 are formed at intervals of about 2mum is produced. This gas-permeable membrane 5 has excellent adhesion, flexibility. water repellency, etc.
|
