| 摘要 |
PURPOSE:To improve a superconductive characteristic by using a plurality of targets containing respective atoms which compose a superconductor and serially piling layers of the respective atoms by the use of a vapor growth method so that each layer is thick enough to form perovskite type structure. CONSTITUTION:Targets of Y2O3, CuO, BaCO3 (Y-Ba-Cu-O group) or ones of La2O3, BaCO3 (or SrCO3, ScCO3), CuO[La-Ba(or Sr, Sc)-Cu-O system] are used to serially form layers by the use of a vapor growth method on a substrate made of single crystal of either one of MgO, TiO2, SrTiO3, Al2O3, YSZ. Each layer is made thick enough to form perovskite structure. Next this substrate is provided with either heat treatment in an oxygen atmosphere or laser annealing processing.
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