| 摘要 |
PURPOSE:To obtain a sintered AlN article having high purity and high thermal conductivity, by calcining a molded article containing AlN powder and a rare- earth and/or alkaline-earth metal compound in a reducing atmosphere containing N2 gas. CONSTITUTION:AlN powder having an impurity oxygen content of <=7wt.% and an average particle diameter of 0.05-5mum is mixed with 0.01-15wt.% (in terms of element) of a compound of at least one kind of rare-earth element and/or alkaline-earth element selected from Y, Sc, Ce, Dy, Ca, Sr and Ba and with a binder. The mixture is granulated, molded and heated in a non-oxidizing atmosphere to eliminate the binder and obtain a molded article. The article is put into a vessel lined with an AlN plate, a BN plate, a W plate or a carbon plate, sintered in a reducing atmosphere containing N2 gas at 1,550-1,850 deg.C for 0.5-12hr and further sintered at 1,750-2,050 deg.C for >=1hr. |
