| 摘要 |
PURPOSE:To safely remove a silver conduction film stuck to a nickel stamper without etching the nickel surface of the stamper and to prevent the deterioration of the characteristics of the stamper by oxidizing the film and removing formed silver oxide. CONSTITUTION:In a stage for etching a silver conduction film 2 in an optical disk mastering process, the film 2 is left on a nickel stamper 3 on the information recording side after a resist is removed. The stamper 3 is cleaned with oxygen plasma 4 in an oxygen plasma cleaning device. The film 2 is oxidized with the plasma 4 and converted into black powdery silver oxide 5. At the same time, the remaining resist 1 is decomposed and falls from the film 2. The silver oxide powder 5 is then removed from the stamper 3 in pure water 7 with a wiper 6 having a soft brush. The resulting nickel stamper 3 gives an optical disk which does not deteriorate the electrical signal characteristics of recorded information. |
