| 摘要 |
PURPOSE:To form a slightly gas emitting wall surface on the inner surface of a vacuum vessel or the like and to shorten the time required to evacuate the vessel by lining the vessel with a carbon film. CONSTITUTION:A vacuum vessel or the like is lined with a carbon film to form a slightly gas emitting wall surface on the inner surface of the vessel. The carbon film can be easily and uniformly formed by deposition with hydrocarbon plasma generated by electric discharge. The formed carbon film has a diamond, graphite or amorphous structure. The high purity carbon film is chemically stable, hardly adsorbs gas molecules, especially water molecules an hardly emits gas. The emission of gas from the vacuum vessel lined with the high purity carbon film is suppressed as a whole and the time required to evacuate the vessel is shortened.
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