发明名称 Method forming surface emitting diode laser
摘要 A method and apparatus for forming a monolithic surface emitting laser diode array by providing vertical partly light transmissive mirror surfaces opposite parabolic light reflective mirror surfaces formed adjacent the active buried layer of a heterostructure diode laser. The mirror surfaces are preferably formed using a mass-transport heating process. Other mirror shapes may be formed in accordance with the invention.
申请公布号 US4784722(A) 申请公布日期 1988.11.15
申请号 US19870109945 申请日期 1987.10.19
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 LIAU, ZONG-LONG;WALPOLE, JAMES N.
分类号 H01S5/02;H01S5/18;H01S5/42;(IPC1-7):H01L21/306;B44C1/22;C03C15/00;C03C25/06 主分类号 H01S5/02
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