发明名称 |
Method forming surface emitting diode laser |
摘要 |
A method and apparatus for forming a monolithic surface emitting laser diode array by providing vertical partly light transmissive mirror surfaces opposite parabolic light reflective mirror surfaces formed adjacent the active buried layer of a heterostructure diode laser. The mirror surfaces are preferably formed using a mass-transport heating process. Other mirror shapes may be formed in accordance with the invention.
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申请公布号 |
US4784722(A) |
申请公布日期 |
1988.11.15 |
申请号 |
US19870109945 |
申请日期 |
1987.10.19 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
LIAU, ZONG-LONG;WALPOLE, JAMES N. |
分类号 |
H01S5/02;H01S5/18;H01S5/42;(IPC1-7):H01L21/306;B44C1/22;C03C15/00;C03C25/06 |
主分类号 |
H01S5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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