| 摘要 |
PURPOSE:To simplify the structure of an angular velocity measuring instrument by arranging an excitation electrode, an intermediate, and two detection electrodes on the same surface of a flat plate type piezoelectric substrate. CONSTITUTION:A grating 6, excitation electrodes 3 and 2 a shield electrode 15, the intermediate electrode 14, and a grating 7 are arrayed in order on one surface of the piezoelectric substrate 1 along an axis of rotation, and the two detection electrodes 4 and 5 are provided on both sides of the intermediate electrode 14 opposite each other. When the piezoelectric substrate 1 rotates and the excitation electrodes 3 and 2 excite surface acoustic waves, the piezoelectric substrate 1 vibrates to generate a Coriolis force at the vibration part by said vibrations and the rotation of the piezoelectric substrate 1, thereby generating surface acoustic waves from the intermediate electrode 14 to the detection electrodes 4 and 5. The detection electrodes 4 and 5 generate a voltage proportional to the angular speed of the piezoelectric substrate 1 and the voltage is outputted through a differential amplifier 17. |
