| 摘要 |
PURPOSE:To increase the efficiency of utilization of a target and to improve the uniformity of thickness of a film by forming plural magnetic gaps in the radial directions of the target so as to constitute a magnetic circuit. CONSTITUTION:Plural magnets 13, 14 are arranged and fixed on a back yoke 15 made of a ferromagnetic body on the rear side of a backing plate 12 supporting a target 11 so that magnetic gaps are radially formed. The magnets 13, 14 are magnetized in the thickness direction, the S and N are alternately arranged on both the gap and yoke sides and the width of each of the magnetic gaps is narrowed from the center toward the periphery in 1:about 0.7 ratio. The target 11 is uniformly consumed during sputtering and the consumed surface is radially formed because of the radial magnetic gaps. The entire surface of the target 11 can be effectively used by properly changing the angle of fitting of the target 11.
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