摘要 |
PURPOSE:To produce the titled sintered article having high density and thermal conductivity, by calcining a specific molded article or sintered article in a calcination vessel made of AlN in an atmosphere or in vacuum. CONSTITUTION:AlN powder having impurity oxygen content of <=7wt.% and an average particle diameter of 0.05-5mum is mixed with 0.01-15wt.% (in terms of element) of a compound of at least one kind of element selected from group IIa, group IIIa and rare-earth elements and a binder. The mixture is granulated, graded and molded to obtain a molded article. The molded article or a sintered article containing 0.01-15wt.% of at least one kind of element selected from group IIa, group IIIa and rare earth elements, having an oxygen content of 0.01-20wt.% and containing AlN as a principal phase and a (group IIa, group IIIa or rare earth element)-Al-O compound phase and/or (group IIa, group IIIa or rare earth element)-O compound phase is put into a calcination vessel made of AlN and calcined in vacuum or in a non-oxidizing atmosphere at 1,550-2,050 deg.C for >=4hr. |