| 摘要 |
PURPOSE:To raise an equivalent sensitivity to satisfactorily project the image of an object of low reflection factor or a fluorescent image by operating a second deflecting means and a linear image sensor in accordance with the standard system and reducing the scanning rate of a first deflecting means in comparison with that of the standard system. CONSTITUTION:An acoustooptic element 4 as the first deflecting element quickly oscillates a light beam, and the light beam is quickly oscillated to quickly scan the surface of a sample in the X direction. A galvanomirror 9 as the second deflecting means is connected to a driving device 10 and deflects the light beam in the Y direction orthogonal to the X direction of the sample. The scanning rate of the acoustooptic element 4 is reduced to 1/n of the standard scanning rate of the galvanomirror 9 and a linear image sensor 14. Wherein (n) is a natural number larger than one. Since the second deflecting means 9 and the linear image sensor 14 are operated at an optimum scanning rate, a picture signal of high S/N is obtained even if the image of a sample of very low reflection factor is picked up.
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