摘要 |
PURPOSE:To enable the post-sealing visual inspection of the inside of a semiconductor device without impairing the device capability of stopping electromagnetic radiation from being emitted to the outside by providing one or more visible ray transmitting regions in a lid part of a container and the remaing region is covered with an electrically conductive material which is grounded. CONSTITUTION:A GaAs FET element 1 is fixed immovable to a container metal stem 2 to serve as a source terminal. The gate and drain electrodes of the FET element 1 are connected, respectively, by wires to input and output matching boards 4a and 4b installed on the cotainer metal stem 2. A package cover 6 is built of a sapphire plate 7 that is transparent to wavelengths including visible rays. To the lower surface to serve as the primary surface of the sapphire plate 7, a lattice-patterned conducting material 8 is electically connected and attached, leaving a plurality of rectangular regions transparent. The diagonal of a rectangle free of the conducting material 8 should be not longer than a 1/8 of the wavelength in the frequency band in use.
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