发明名称 INTEGRATED CIRCUIT TESTING APPARATUS
摘要 PURPOSE:To verify the testing environment before the manufacturing of a testing apparatus, without exclusively providing a measuring part, by providing a measuring-part emulation device and a logic simulation device, and making it possible to simulate a measuring part and a testing apparatus at the same time. CONSTITUTION:A logic-simulation executing part 71 reads the design information of a testing apparatus from a circuit-information storing part 72 and executes logic simulation with the data sent from a data converter 68 as input signals. The result of the simulation is fed back to the converter 68 again. The result of the simulation, whose data back to the converter 68 again. The result of the simulation, whose data are converted, is inputted into a simulation comparator 65, and comparing operation is simulated. The result is stored in an accumulator 66 of the result of the simulated measurement. In this way, a measurement emulation device 6, which simulates a measuring part 2 of an integrated circuit testing apparatus, and a logic simulation device 7, which simulates a testing apparatus 3, and combined, and the simulated operation of the integrated circuit testing can be executed. Therefore, the testing environment can be readily verified before the completion of the manufacturing of the testing apparatus.
申请公布号 JPS63275970(A) 申请公布日期 1988.11.14
申请号 JP19870110701 申请日期 1987.05.08
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 TANNO MASAAKI;TAMAMA AKIO
分类号 G01R31/28;G06F9/06;G06F17/50;H01L21/66 主分类号 G01R31/28
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