摘要 |
PURPOSE:To regulate pressure to two fluids with good accuracy by using two pilot valve portions for the first and second fluids. CONSTITUTION:An electric signal-fluid pressure regulator 10 has a main body 11, a nozzle flapper mechanism 12 disposed in the upper portion of the interior of the main body, the first pilot valve portion 14 and the second pilot valve portion 16. The nozzle flapper mechanism 12 comprises a nozzle 18 of a designated bore, which communicates with a nozzle back pressure chamber 17 of the first pilot valve portion 14 and a plate flapper 20. The flapper 20 comprises two piezoelectric ceramics and an intermediate electrode plate. Air of designated pressure is supplied from the first supply port 44, acetylene gas or the like is supplied from the second supply port 100 and air and acetylene gas, the pressures of which are respectively by an inner valve 36 and a valve element 88, are derived out from the first and second output ports 46, 102.
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