| 摘要 |
PURPOSE:To rotate a rotor when a power source is cut off by coating the both down side peripheral surface and a raceway surface of a turning wheel of touch bearing with a solid lubricating film excellent in wear-resistance and seizure-resistance under high temperature in vacuum apparatus such as a turbo- molecular pump. CONSTITUTION:A touch down bearing 12 comprise an inner ring 15 made by using bearing steel as raw material, an outer ring 16 and a rolling element 17. TiN thin film layer A of about several mum film thickness is formed on the touch down side peripheral surface, that is, the inner peripheral surface 151 of an inner ring 15 acting as a rotating wheel at the time of touch down, a raceway surface 152 of the inner ring 15 and a raceway surface 161 of the outer ring 16 by coating such as a sputtering method, an ion plating method, CVD method or the like. Accordingly, the bearing can withstand touch down over a long period, and stability and seizure-resistance under high temperature are very excellent.
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