| 摘要 |
PURPOSE:To successively confirm in order of parallel many leads provided on the right and left side edges, respectively of a body of an IC, by supporting and racking a second mirror by a mirror box so that it can be inclined and turned freely forward and backward. CONSTITUTION:When the second mirror M2 is turned centering around a pivot 40 by turning an adjusting screw 41 provided on a mirror box 4 integrated into an objective lens system A of the left half side, a focal position on a vertical optical axis x-4 reflected by the mirror M2 is displaced in the forward and backward directions. Accordingly, an IC being a sample is displaced relatively in the forward and backward directions, and an image of the left half side of the IC reflected on a visual field or a screen moves in the forward and backward directions on its visual field or screen. Also, leads 20... provided in parallel in the forward and backward directions on the left side edge of the IC, and its coupling part are switched successively from the lead 20 of one end in the parallel direction and reflected, and their visual confirmation is executed successively in order of parallel. The right half side is also reflected in the same way, and their visual confirmation is executed successively in order of parallel.
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