| 摘要 |
PURPOSE:To raise a vacuum degree at a baking time within a short time, by a method wherein Cl2-gas is introduced into a vacuum apparatus if necessary and the inner wall of the vacuum apparatus is irradiated with ultraviolet rays and the vacuum apparatus is heated simultaneously at this time or before and after this time. CONSTITUTION:In baking a vacuum apparatus, the inner wall of a vacuum chamber 1 is irradiated with ultraviolet rays 7 from the ultraviolet ray source 2 in the vacuum chamber 1 or the ultraviolet rays 7 transmitted through an ultraviolet ray pervious window 3 from the ultraviolet ray source 4 provided outside the vacuum chamber 1 simultaneously with the heating of the vacuum chamber 1 by a heater 6 or before or after heating. The molecules such as H2O, O2, N2 or H2 adsorbed by the inner wall are detached by the heating due to the heater 6 but, since the vibration of the adsorbed molecules is excited by the irradiation of ultraviolet rays, the detachment of the molecules is promoted. Further, by the introduction of Cl2-gas 8, the Cl2-gas is adsorbed by the inner wall and reacted with the molecules hard to evaporate and H2O to further facilitate the detachment of the molecules. |
