| 摘要 |
PURPOSE:To assure the high evenness in compositions by a method wherein two different kinds of compositions respectively contained in two melt reservoirs of movable sheets are alternately formed by liquid growth. CONSTITUTION:A movable sheet (a) is composed of two melt reservoirs 10a, 10b in two slender rows in the slide (c) direction of a slide boat while multiple holes 1 are made in the bottom of respective melt reservoirs at specified intervals. The bottoms 2 provided in the melt reservoirs 10a, 10b of movable sheet (a) and the covers 3 provided in the melt reservoir 11 of another movable sheet (b) protect the melt in the movable sheet (a) from running into the movable sheet (b). In such a state, after melting in the melting reservoirs 10a, 10b, the movable sheet (a) is slidden forward. At this time, the melts A, B in the movable sheet (a) are alternately fed to the melt reservoirs 11 in the movable sheet (b). Next, the movable sheet (b) is slidden forward to successively pass the melts A, B to a substrate 5. Through these procedures, the material once weighed for liquid growth is enabled to be fed to specified multiple melt reservoirs 10a, 10b to form grown layer in high evenness.
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