| 摘要 |
PURPOSE:To prevent a contact resistance from increasing owing to the decrease of area and improve the yield by a method wherein an emitter electrode covering the whole surface of an emitter region, a base electrode sandwiched by the emitter region, and an insulating region provided in a collector region just under the base electrode are constructed. CONSTITUTION:An emitter electrode 82 formed self-alignedly on the whole surface of emitter regions which are formed into an inverted trapezoid through the anisotropic etching, a base electrode 93 formed self-alignedly on a region sandwiched with the emitter region 22, an insulating region 42 formed in a collector region 24 just under the base electrode 93, and a collector electrode 84 built self-alignedly are provided. Thereby, a contact resistance based on an emitter electrode is rendered structurally minimum and moreover the resistance in each region can be rendered smaller as other electrodes are also formed self-alignedly, and capacitance can be decreased because an insulating region is provided in a collector region unneeded just under a base electrode region and also yield can be improved through self-alignment.
|
