| 摘要 |
PURPOSE:To obtain a smooth surface and to simultaneously assure a high heat conductivity by adding specific ratios of the nitride, carbide, etc., of specific elements to a sintered body essentially consisting of an AlN phase to suppress abnormal growth of AlN crystal grains. CONSTITUTION:This composite AlN sintered body consists of ceramics essentially consisting of AlN and the volumetric component ratios in the structure at 4-45% component A, 55-96% component B and <=3% inevitable impurities. The component A is a mixture composed of the nitride, carbide, carbonnitride, oxynitride, carbooxide, and carbooxynitride of group IVa, Va, and VIa elements of periodic table and >=1 kinds selected from Al2O3 and AlN except Al2O3 or AlN alone or the solid soln. thereof. The component B is the ceramics contg. 0.1-30wt.% mixture composed of the oxide, nitride, carbide, oxynitride, carbonnitride, carbooxide, and carbooxynitride of group IIa and IIa elements and >=1 kinds selected from Al2O3 and AlN or the solid soln. thereof and consisting of the balance AlN. |
