发明名称 THIN FILM FORMING DEVICE
摘要 PURPOSE:To prevent the elution of metal ions and infiltration of metal powder into thin film forming ink by forming the surface of the inner wall of the recess of an intaglio, the surface of the bank part, and the edge of a doctor blade with a ceramic. CONSTITUTION:The ink supplied by a supply means 20 is uniformly filled in the recess 11 of the intaglio 10 by a drawdown means 30 consisting of the doctor 31 having a doctor blade 32. A body 3 to be printed placed on a surface plate 41 is moved to a printing position A while rotating the intaglio 10 by a motor 61. The body 3 is brought into contact with the intaglio 10 at this place, and a thin film of a specified pattern is printed on the surface. In such a thin film forming device, at least the surface of the inner wall of the recess 11, the bank part, and the edge of the doctor blade 32 are formed with a ceramic. Inorg. nitride, carbide, and oxide are used as the ceramic, and the thin film is formed in 0.1-10mum thickness by a coating process such as reactive sputtering, reactive ion plating, and plasma CVD.
申请公布号 JPS63274760(A) 申请公布日期 1988.11.11
申请号 JP19870108090 申请日期 1987.04.30
申请人 NISSHA PRINTING CO LTD 发明人 HASHIMURA YASUHIRO;MEN AKITERU
分类号 C23C14/22;C23C14/06 主分类号 C23C14/22
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