| 摘要 |
<p>PURPOSE:To enable semiconductor substrate lots to be processed in the optimum positions in a furnace by a method wherein the optimum positions and the precedence order per semiconductor substrate lot are automatically judged by a controller to re-erect the lots on the positions suitable for them. CONSTITUTION:A resetting mechanism 4 is controlled by a controller 5 while this controller 5 is previously informed of respective identification numbers of semiconductor substrate lots to be processed from now on by a preceding controller 6 to determine the re-erecting positions by the optimum positions and precedence. Therefore, the semiconductor substrate lot 3 fed from preceding process to this position can be automatically reset at a position previously determined for setting. Finally, six lots assumed as one batch to be processed next time and reset in order on the specified position are loaded on a mother boat 1 to be inserted into a diffusion furnace for processing.</p> |
