| 摘要 |
PURPOSE:To prevent a deformation at the time of taking out a stamper by disposing a groove of a diameter the same as or larger than that of the stamper on a polishing jig disk, forming a film layer high in a mold releasing characteristic in an internal area from the groove, bonding the stamper on this surface by an adhesive sheet or the like and polishing. CONSTITUTION:The groove 16 slightly larger than the diameter of the stamper 5 is disposed on the polishing jig disk 15 and a fluororesin 17 high in the molding releasing characteristic is coated on the internal area from the groove 16. Both surface adhesive sheet 18 having a larger diameter than the diameter of the groove is bonded to this surface. The stamper 5 having a recording surface covered by a protecting layer 19 is bonded thereon. According to this constitution, the stamper is fixed on the polishing jig disk to polish. Thereby, the deformation of the stamper generated at the time of removing can be prevented.
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