| 摘要 |
PURPOSE:To improve durability by using a discharge gas contg. at least carbon dioxide in addition to hydrocarbon at the time of forming a hard diamond carbon film on a partially oxidized thin ferromagnetic metallic film. CONSTITUTION:The discharge gas 8 contg. at least the carbon dioxide in addition to the hydrocarbon is used at the time of forming the hard diamond-like carbon film on the partially oxidized thin ferromagnetic metallic film 1. Since oxidation and reduction act to co-exist, the hardness of the partially oxidized film is maintained and in addition, the hard DLC film is formed. The sufficient durability is thereby obtd. even if the thickness of the DLC film is small.
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