发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To enable the automating of matching and the like, and the reduction of manhour, by providing the inside of an outer periphery collet to fix a semiconductor pellet on an island, with a surface suction collet capable of moving up and down. CONSTITUTION:A completely cut semiconductor pellet 5 on a sheet 6 is attracted to a surface suction collet 4, by the exhaust from a discharging pipe 2 of the surface suction collet 4 in a two-surface collet 3 as an outer periphery collet. Just before a semiconductor pellet 5 comes into contact with the island 9 of a lead frame 8, the air supply to an air pipe 1 is interrupted. While the surface suction collet 4 is accommodated in the two-layer collet 3, the exhaust from the discharging pipe 2 is interrupted at the moment when the semiconductor pellet 5 comes into contact with the island 9, and the two-surface collet 3 washes the semiconductor pellet 5, which is fixed on the island 9. Thereby, the automating of matching and the like, and the reduction of manhour are enabled.
申请公布号 JPS63275131(A) 申请公布日期 1988.11.11
申请号 JP19870111823 申请日期 1987.05.07
申请人 NEC CORP 发明人 ETO KEIKI
分类号 H01L21/677;H01L21/52;H01L21/68 主分类号 H01L21/677
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