Method and device for evaporation by means of arc discharge evaporator

摘要

The invention relates to a method and a device for evaporating a plurality of different materials or one material in large amounts by means of an arc discharge evaporator. According to the invention the different or further evaporation material has applied to it, within the external plasma, a variable, positive potential which, with respect to chassis (frame) is higher than that of the anodic principle of the arc discharge evaporator. As a result, electrons are extracted from the plasma with such energy and current density onto the evaporation material that the latter melts or evaporates. In the process, the evaporation material can be held in a separate crucible or be fed in, via a special feed device, in the form of a wire, in such a way that after melting it drops into the evaporator crucible of the arc discharge evaporator and thence is evaporated. <IMAGE>