发明名称 VORRICHTUNG ZUM GESTEUERTEN ABLENKEN EINES LICHTSTRAHLES
摘要 Device for controlled deflection of a light beam emanating from a fixed light source, e.g. a laser beam, namely in two dimensions, by means of an adjustable deflection mirror journalled in a holding head, particularly intended for guiding a pulsed light beam along a mandering path for the purpose of marking specific points on small components (chips) or similar, characterized in that the holding head (1) for the deflection mirror (2) is journalled in itself and that a drive (3) is provided in the holding head (1) for turning the mirror (2) vertically to the rotation axis of the holding head (1).
申请公布号 DE3713502(A1) 申请公布日期 1988.11.10
申请号 DE19873713502 申请日期 1987.04.22
申请人 HERRMANN,JAKOB 发明人 HERRMANN,JAKOB
分类号 B23K26/08;G06K1/12;H01L23/544;(IPC1-7):G02B26/10;G06K15/12 主分类号 B23K26/08
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